1、设备名称： exitech m9000
2、设备品牌：英国exitech
3、设备功能： 准分子激光微加工系统
4、设备应用：
•太阳能电池及面板划线 •硅片钻切割 •连接器 •显示设备层图案
5、使用材料： •硅 •陶瓷 •薄膜 •钻石 •光学材料
6、设备英文介绍：
the m9000 is designed for the high accuracy and high speed drilling, scribing, and pattering of a wide variety of materials for numerous precision applications.
the special architecture of the m9000 can incorporate two high repetition rate lasers for great flexibility in micromachining of samples with multiple layers。the m9000 has been specially developed to meet the exacting requirements of multi-shift production using high accuracy stages and high resolution optics. the integration of specially developed state-of-the-art calibration systems and diagnostics give unprecedented levels of precision, automated operation and reliability
with robotic loading/unloading options, automatic substrate alignment and turn-key operation, the m9000 is a robust production tool designed and manufactured for challenging industrial environments.
the m9000 is particularly suited for the precision of high aspect ratio microhholes. techniques such as helical trepanning or percussion drilling can be used for the controlled production of high resolution features.
materials:
•silicon
•ceramics
•thin films
•diamond
•optical materials
main features:
•options for solid-state & carbon dioxide lasers
•customised optics and beam delivery
•special beam dither function for controlled drilling
•adjustment of beam focus during drilling
•400mm (x) and 400mm (y) travel sample stages with 0.5µm resolution and 500mm/sec speed
•option for up to 1m x 1m stage travel at speeds up to 1.5m/sec
•30mm (z) elevator stage with 1µm resolution
•controlled gas assist and integrated nozzle
•specially-designed precision chuck
•in-chuck beam profiler to monitor beam focus
•automatic calibration of xy stages
•ccd camera viewing of sample
•automatic alignment option using ccd camera
•option for non-contact sample height detector
•in-built laser power meter for automated setting of processing power level
•clean room compatible
•specially-developed exitech control software
•class 1 laser-safe tool
7、设备中文介绍：
•太阳能电池及面板划线 •硅片钻切割 •连接器 •显示设备层图案m9000服务器是专为高精度和高速钻孔，划线，淅沥的许多精密应用的材料种类繁多。m9000服务器的特殊结构，可以将两个很大的灵活性，多层次的样品微细的高重复率激光器。m9000服务器已专门开发，以满足使用精度高的阶段和高分辨率光学移多生产的严格要求。特别发达的国家的最先进的校准系统和诊断的集成给予了前所未有的水平精度，自动化操作和可靠性 与机器人装载/卸载选项，自动基板对齐和交钥匙操作，m9000服务器是一个健壮的具有挑战性的工业环境设计和制造的生产工具。 特别适合高方面比microhholes的精密m9000服务器。穿孔技术如螺旋或冲击钻可用于高分辨率功能的控制生产。 材料： •硅 •陶瓷 •薄膜 •钻石 •光学材料 主要特点： 固态二氧化碳激光器的选项 •定制的光学和光束传输 •特殊的“光束抖动”功能控制钻井 •束聚焦在钻井过程中的调整x400毫米（x）和400mm（y）的旅游0.5μm的分辨率和速度500mm/sec样品阶段 •选择速度可达1.5m/sec为1m×1m阶段旅游 •30毫米（z）的电梯分辨率为1μm的阶段 •受控气体辅助和综合喷嘴 特别设计的精密夹头 •在夹头束探查监控束聚焦 •自动校准的xy阶段 •ccd相机样本观看 •使用ccd相机的自动对齐选项 •选择非接触样品高度探测器 •内置激光加工功率水平的自动化设置功率计 •清洁室兼容 特别发达exitech控制软件
深圳市昊光机电科技应用有限公司
王明
13631617125
：深圳市龙岗区坪地镇高桥产业区麻沙旭达工业区1栋