一、公司介绍
扬州市神州科技有限公司成立于2003年，现有专业技术人员40人, 员工50人, 专业从事射频等离子体电源的维修、维护及销售，主要服务内容包括：为半导体工厂，液晶面板工厂等提供ae, mks(eni), daihen, ad-tec, kyosan,rfpp等国际品牌的射频电源、直流电源、匹配器、rps及各类半导体设备维修、销售、客户方案定制与老式机型替代，并提供现场支持服务。 
公司主要客户：tsmc, hynix, smic, ivo, jcap, memsic, hhnec, sz tianma, hejian, ja solar,sony, toshiba, best solar等。
二、产品介绍
ae dressler cesar 1330 13.56mhz 3000w 射频电源
specification
frequency 13.560 mhz +/- 0.005%
max output power 3000 w into a 50??load
min output power 30 w into a 50??load
reflected power limit 600 w
delivered power into mismatch 20% depending on the load impedance 
load impedance  50??
rf connector 50??, 7/16 type, female
rf power regulation mode p forward, p delivered, or dc selfbias voltage
regulation (of set point) 1.0 or 0.1% of full-rated power,
whichever is greater, into a 50??load
response time (ms)
turn off/decay time (ms)
harmonics -45 dbc at full-rated power
spurious content -60 dbc max at full-rated power
pulse mode yes 
pulse repetition frequency 1 to 30 khz
pulse duty cycle 1% to 99% 
pulse rf envelope rise / fall time (ms)
cex operation mode yes 
cex input signal as required 0 to +10 dbm
cex output signal specifications +3 to +10 dbm
cex connector (50??) bnc, female
display lcd graphic display
256 x 132 dots , black / white
interlocks and limits
reflected power yes
overtemperature yes
current limit yes
dc overload yes
rf power limit yes
cooling
cooling water cooling
air cooling requirement 118 m/h3
min cooling water flow rate 4.5 lpm
cooling water pressure 0.5 bar (7.25 psi) 
differential as required to achieve min flow rate
max cooling water pressure 8 bar (116.03 psi)
max inlet; not recommended for operation
cooling water temperature 20 to 30 °c (68 to 86 °f)
must be always higher than ambient to avoid condensation
coolant connectors / fittings for plastic tubing of 100 mm od/8 mm id
ac power line
ac line voltage (3-phase) 3 x 200 vac (180 vac to 230 vac)
ac line frequency 50/60 hz 
ac line current (per phase) 3 x 16 a nominal line, full power
ac input power 4950 va
efficiency line to load 65%
power factor 90%
ac mains connection open mains cable at full power
physical specification
packaging 19 rack cabinet
mounting 19 rack mounting
weight 32.5 kg (71.65 lb)
clearance 60 mm (2.36) on each side for air flow into unit 
dimensions 133 mm (h) x 483 mm (w) x 550 mm (d)
5.24 (h) x 19 (w) x 21.65 (d)
interfaces interlock
matching interface
diagnostic interface
更多产品信息请与我们联系！
三、品质保障
我们所销售的电源、匹配器及rps等如无特殊说明，均提供6个月的免费保修服务。
我们为销售产品提供终身维修服务，并可提供exchange服务，保证客户的生产正常进行。
四、运输
我们为所有出厂的机器提供最结实的包装，保证运输过程中机器的安全。

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扬州市神州科技有限公司
范一鸣
13773530367
开发区鸿大路27号